1 中国科学院国家空间科学中心复杂航天系统电子信息技术重点实验室，北京 100190
2 中国科学院大学，北京 100049
基于微型X射线闭管的X射线荧光谱仪是深空探测新一代元素就位分析技术，研制了一款微型微焦斑X射线闭管作为X射线荧光分析的激发源。设计了一种新型的单极静电聚焦透镜，仿真模拟了电子聚焦光学结构尺寸对电子束运动轨迹的影响，并对静电聚焦结构的形状和尺寸进行了优化。完成了微型一体化X射线源的加工和装调，搭建了X射线源性能测试装置。微型一体化X射线源工作电压2~50 kV、X射线强度不稳定性为0.3%、高压不稳定性为0.21%。在高压50 kV、电子电流50 μA的情况下，微型一体化X射线源的总功耗5 W，焦斑尺寸177 μm×451 μm，可以满足深空探测行星表面物质成分原位分析需求。
元素原位分析 微型X射线闭管 微焦斑 静电聚焦透镜 光学学报
2023, 43(14): 1434002
Author Affiliations
Abstract
1 National Space Science Center, Chinese Academy of Science, Beijing 100190, China
2 University of Chinese Academy of Science, Beijing 100190, China
The vacuum-sealed miniature modulated x-ray source (VMMXS) with a hot cathode is fabricated via the single-step brazing process in a vacuum furnace. An experiment following the VMMXS is implemented to present its performances, including the influence of grid electrode potential on x-ray intensities. The modulation type of the grid electrode as a switch is proposed, and its feasibility is successfully demonstrated. It is noteworthy to discover a phenomenon for the first time, to the best of our knowledge, that the high repetition frequency grid pulse of the VMMXS has a significant effect on the x-ray intensity. The probable cause for this new finding is analyzed.
340.7480 X-rays, soft x-rays, extreme ultraviolet (EUV) 230.6080 Sources 260.6048 Soft x-rays 300.6560 Spectroscopy, x-ray Chinese Optics Letters
2016, 14(7): 073401
